The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 03, 2019

Filed:

Nov. 17, 2015
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Yasuhito Sasaki, Saitama, JP;

Mitsuru Seki, Chikusei, JP;

Takeshi Nakajima, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03F 7/20 (2006.01); G02B 17/06 (2006.01); G03B 21/28 (2006.01);
U.S. Cl.
CPC ...
G03F 7/702 (2013.01); G02B 17/0605 (2013.01); G02B 17/0615 (2013.01); G03B 21/28 (2013.01); G03F 7/709 (2013.01); G03F 7/70233 (2013.01);
Abstract

There is provided a projection optical system that projects an image of an object onto an image plane. The projection optical system includes an imaging optical system including a first concave mirror, a convex mirror, and a second concave mirror; an optical member having a first reflecting surface and a second reflecting surface each redirecting an optical path; and a supporting member that supports the convex mirror. The first reflecting surface, the first concave mirror, the convex mirror, the second concave mirror, and the second reflecting surface are provided in that order in a direction of travel of light from an object plane. The optical member has a through hole having an opening on a side facing the convex mirror. The supporting member extends through the through hole and from the opening to the convex mirror.


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