The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 03, 2019

Filed:

Oct. 11, 2018
Applicant:

Carl Zeiss Industrielle Messtechnik Gmbh, Oberkochen, DE;

Inventors:

Aksel Goehnermeier, Essingen-Lauterburg, DE;

Ferdinand Bader, Ellwangen, DE;

Dietrich Imkamp, Schwaebisch Hall, DE;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/00 (2006.01); G01B 9/02 (2006.01); G01B 5/008 (2006.01); G01B 5/28 (2006.01); G01B 11/30 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02031 (2013.01); G01B 5/008 (2013.01); G01B 5/28 (2013.01); G01B 11/303 (2013.01);
Abstract

A probing element for measuring at least one measurement object is provided. The probing element includes at least one first optical sensor configured to generate at least one first sensor signal depending on a fine shape of at least one surface of the measurement object, at least one second sensor configured to generate at least one second sensor signal depending on at least one of a coarse shape of the measurement object, and a distance to the measurement object. The at least one first optical sensor has a first measurement region and the at least one second sensor has a second measurement region. The at least one first optical sensor is at least partly integrated in the at least one second sensor to permit the first measurement region and the second measurement region to at least partly overlap.


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