The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2019
Filed:
Mar. 21, 2017
Applicant:
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Inventor:
Kakeru Takahashi, Tokyo, JP;
Assignee:
SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04B 37/08 (2006.01); F04B 51/00 (2006.01); F04B 39/10 (2006.01); G01L 21/32 (2006.01); F04B 49/06 (2006.01);
U.S. Cl.
CPC ...
F04B 51/00 (2013.01); F04B 37/08 (2013.01); F04B 37/085 (2013.01); F04B 39/10 (2013.01); F04B 49/06 (2013.01); G01L 21/32 (2013.01);
Abstract
A cryopumped gas amount estimation device includes: an ultimate pressure determination unit which determines an ultimate pressure of a cryopump vacuum vessel, based on a vacuum measurement signal representing the degree of vacuum in the cryopump vacuum vessel; and a cryopumped gas amount quantification unit which includes a cryopumped gas amount quantification relation correlating the ultimate pressure with a cryopumped gas amount estimated value and converts the ultimate pressure into the cryopumped gas amount estimated value.