The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2019
Filed:
Sep. 20, 2016
Applicant:
Edwards Vacuum Llc, Sanborn, NY (US);
Inventor:
Jeffrey A Wells, Milford, NH (US);
Assignee:
Edwards Vacuum LLC, Sanborn, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
F04B 37/08 (2006.01); F04B 53/16 (2006.01);
U.S. Cl.
CPC ...
F04B 37/08 (2013.01); F04B 53/16 (2013.01); Y10S 417/901 (2013.01);
Abstract
A cryopump comprises a refrigerator, a condensing array cooled by the refrigerator, a radiation shield surrounding the condensing array and cooled by the refrigerator. The radiation shield has a frontal opening covered by a frontal array that is also cooled by the refrigerator. The frontal array comprises louvers across an otherwise substantially open center region of the frontal opening and an orifice plate across an outer region of the frontal opening. The hybrid frontal array allows for pumping speeds approximating those of a louver frontal array but with flow control comparable to an orifice plate.