The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2019
Filed:
Jan. 03, 2011
Applicant:
Wenjun Qin, Missoula, MT (US);
Inventor:
Wenjun Qin, Missoula, MT (US);
Assignee:
OCI COMPANY LTD., Seoul, KR;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); C23C 16/50 (2006.01); C23C 16/44 (2006.01); C01B 33/035 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4418 (2013.01); C01B 33/035 (2013.01);
Abstract
The present invention provides chucks having a well that supports rods produced during chemical vapor deposition. The chucks can utilize slats and windows around the well up to which the rod can grow and become supported.