The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2019
Filed:
Aug. 12, 2016
Applicants:
Boe Technology Group Co., Ltd., Beijing, CN;
Hefei Xinsheng Optoelectronics Technology Co., Ltd., Hefei, Anhui, CN;
Inventors:
Assignees:
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD., Hefei, Anhui, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/00 (2006.01); C23C 14/24 (2006.01); C23C 14/04 (2006.01); C23C 14/54 (2006.01);
U.S. Cl.
CPC ...
C23C 14/243 (2013.01); C23C 14/042 (2013.01); C23C 14/044 (2013.01); C23C 14/24 (2013.01); C23C 14/542 (2013.01); C23C 14/548 (2013.01); H01L 51/001 (2013.01);
Abstract
An evaporation apparatus comprises an evaporation chamber () and a moving device (); the evaporation chamber () is provided with an evaporation source () therein and is provided with two regulating plates () on a side wall thereof; the moving device () is disposed on the bottom of the evaporation chamber (). An evaporation method by use of the evaporation apparatus is also disclosed.