The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 03, 2019

Filed:

May. 10, 2017
Applicant:

AZ Electronic Materials (Luxembourg) S.Ă  R.l., Luxembourg, LU;

Inventors:

Takashi Fujiwara, Shizuoka, JP;

Ralf Grottenmueller, Wiesbaden, DE;

Takashi Kanda, Shizuoka, JP;

Tatsuro Nagahara, Shizuoka, JP;

Assignee:

Ridgefield Acquisition, Luxembourg, LU;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01B 33/08 (2006.01); H01L 21/02 (2006.01); C09D 183/00 (2006.01); C01B 21/087 (2006.01); C23C 18/12 (2006.01); C08G 77/62 (2006.01); C09D 183/16 (2006.01); C09D 1/00 (2006.01); C01B 33/12 (2006.01);
U.S. Cl.
CPC ...
C01B 21/087 (2013.01); C01B 33/08 (2013.01); C01B 33/126 (2013.01); C08G 77/62 (2013.01); C09D 1/00 (2013.01); C09D 183/16 (2013.01); C23C 18/122 (2013.01); C23C 18/1212 (2013.01); H01L 21/02164 (2013.01); H01L 21/02222 (2013.01); H01L 21/02282 (2013.01); H01L 21/02323 (2013.01); H01L 21/02326 (2013.01); H01L 21/02337 (2013.01); C23C 18/1225 (2013.01); Y10T 428/31663 (2015.04);
Abstract

An inorganic polysilazane resin of the present invention has a Si/N ratio (i.e. a ratio of contained silicon atoms to contained nitrogen atoms) of 1.30 or more. The inorganic polysilazane resin having such a high Si content can be produced by, for example, a method in which an inorganic polysilazane compound containing both Si—NH and Si—Cl is heated to react NH with Cl, a method in which a silazane oligomer (polymer) that leaves no Si—Cl bond is synthesized and a dihalosilane is added to the synthesized silazane oligomer (polymer) to perform a thermal reaction, and the like. A siliceous film can be formed by, for example, applying a coating composition containing the inorganic polysilazane resin onto a base plate and then dried and the dried product is then oxidized by bringing the dried product into contact with water vapor or hydrogen peroxide vapor and water vapor under heated conditions.


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