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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10490679 B1

PDFFull Text
Date of Patent:
Nov. 26, 2019

Filed:

Oct. 12, 2018

Fabrication of multilayer nanograting structures

Applicant:

The Curators of the University of Missouri, Columbia, MO (US);

Inventors:

Shubhra Gangopadhyay, Colombia, MO (US);

Sangho Bok, Cedar City, UT (US);

Samiullah Pathan, Columbia, MO (US);

Cherian Joseph Mathai, Columbia, MO (US);

Sagnik Basuray, Parsippany, NJ (US);

Keshab Gangopadhyay, Columbia, MO (US);

Biyan Chen, Columbia, MO (US);

Sheila Grant, Columbia, MO (US);

Aaron Wood, Columbia, MO (US);

Assignee:

The Curators of the University of Missouri, Columbia, MO (US);

Attorney:

Erise IP, P.A.

Primary Examiner:

Eduardo A Rodela

Int. Cl.
CPC ...
H01L 31/0236 (2006.01); H01L 31/0216 (2014.01); H01L 33/50 (2010.01); H01L 33/44 (2010.01); H01L 31/0232 (2014.01); H01L 29/66 (2006.01); G02B 1/14 (2015.01); G02B 1/18 (2015.01); B82B 3/00 (2006.01); C01G 23/04 (2006.01); C08J 5/00 (2006.01); G02B 1/04 (2006.01); G02B 1/12 (2006.01); G02B 5/00 (2006.01); G02B 5/18 (2006.01); G02B 5/20 (2006.01); G02B 27/42 (2006.01); G02B 27/44 (2006.01); H01L 21/02 (2006.01); H01L 51/52 (2006.01); G02B 5/30 (2006.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
H01L 31/02366 (2013.01); B82B 3/0038 (2013.01); B82B 3/0047 (2013.01); C01G 23/04 (2013.01); C08J 5/005 (2013.01); G02B 1/04 (2013.01); G02B 1/12 (2013.01); G02B 1/14 (2015.01); G02B 1/18 (2015.01); G02B 5/008 (2013.01); G02B 5/18 (2013.01); G02B 5/1809 (2013.01); G02B 5/1847 (2013.01); G02B 5/1852 (2013.01); G02B 5/1861 (2013.01); G02B 5/1866 (2013.01); G02B 5/203 (2013.01); G02B 5/3058 (2013.01); G02B 27/42 (2013.01); G02B 27/4244 (2013.01); G02B 27/44 (2013.01); H01L 21/02107 (2013.01); H01L 21/02109 (2013.01); H01L 21/02112 (2013.01); H01L 29/66977 (2013.01); H01L 31/0216 (2013.01); H01L 31/0232 (2013.01); H01L 31/02322 (2013.01); H01L 31/02327 (2013.01); H01L 33/44 (2013.01); H01L 33/50 (2013.01); H01L 33/501 (2013.01); H01L 33/508 (2013.01); H01L 51/52 (2013.01); H01L 51/5209 (2013.01); H01L 51/5215 (2013.01); H01L 51/5218 (2013.01); H01L 51/5275 (2013.01); B82Y 40/00 (2013.01);
Abstract

Provided are nanograting structures and methods of fabrication thereof that allow for stable, robust gratings and nanostructure embedded gratings that enhance electromagnetic field, fluorescence, and photothermal coupling through surface plasmon or, photonic resonance. The gratings produced exhibit long term stability of the grating structure and improved shelf life without degradation of the properties such as fluorescence enhancement. Embodiments of the invention build nanograting structures layer-by-layer to optimize structural and optical properties and to enhance durability.

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