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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10490640 B1

PDFFull Text
Date of Patent:
Nov. 26, 2019

Filed:

Dec. 06, 2018

Semiconductor memory device

Applicant:

Toshiba Memory Corporation, Tokyo, JP;

Inventors:

Takeshi Sonehara, Yokohama Kanagawa, JP;

Erika Kodama, Yokohama Kanagawa, JP;

Nobutaka Nakamura, Yokohama Kanagawa, JP;

Tsuneo Inaba, Kamakura Kanagawa, JP;

Koichi Nakayama, Hiratsuka Kanagawa, JP;

Assignee:

TOSHIBA MEMORY CORPORATION, Tokyo, JP;

Attorney:

Kim & Stewart LLP

Primary Examiner:

Marc Anthony Armand

Int. Cl.
CPC ...
H01L 29/417 (2006.01); H01L 23/528 (2006.01); H01L 27/1158 (2017.01); H01L 27/11556 (2017.01); H01L 27/1157 (2017.01); H01L 27/11582 (2017.01); H01L 27/24 (2006.01); G11C 8/10 (2006.01); G11C 7/18 (2006.01); G11C 8/14 (2006.01); G11C 16/08 (2006.01); G11C 13/00 (2006.01); H01L 45/00 (2006.01);
U.S. Cl.
CPC ...
H01L 29/41741 (2013.01); H01L 23/528 (2013.01); H01L 27/1157 (2013.01); H01L 27/1158 (2013.01); H01L 27/11556 (2013.01); H01L 27/11582 (2013.01); H01L 27/249 (2013.01); H01L 27/2454 (2013.01); G11C 7/18 (2013.01); G11C 8/10 (2013.01); G11C 8/14 (2013.01); G11C 13/0026 (2013.01); G11C 13/0028 (2013.01); G11C 16/08 (2013.01); H01L 45/04 (2013.01); H01L 45/1226 (2013.01); H01L 45/146 (2013.01);
Abstract

According to one embodiment, a semiconductor memory device includes a plurality of electrodes, extending in a first direction and a second direction orthogonal to the first direction are stacked one over the other, and include opposed sides extending in the second direction, a plurality of protrusion portions extending from the first side of the electrodes and spaced from one another in the second direction, and an extraction portion extending from the second side of the electrode. First and second contact plugs extend in a third direction orthogonal to the first and second directions, one of each contacting one of the extraction portions, wherein the extraction portion extending from the uppermost of the electrodes is located closer to the center of the second side in the second direction, than the location of the extraction portion extending from the lowermost of the electrodes.

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