The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 26, 2019

Filed:

Jul. 30, 2018
Applicant:

Pfc Device Holdings Limited, Hong Kong, HK;

Inventor:

Kuan-Yu Chen, New Taipei, TW;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 21/265 (2006.01); H01L 29/10 (2006.01); H01L 29/167 (2006.01); H01L 29/08 (2006.01); H01L 21/266 (2006.01); H01L 21/20 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0634 (2013.01); H01L 21/20 (2013.01); H01L 21/266 (2013.01); H01L 21/26506 (2013.01); H01L 21/26513 (2013.01); H01L 29/0623 (2013.01); H01L 29/0684 (2013.01); H01L 29/0847 (2013.01); H01L 29/1095 (2013.01); H01L 29/167 (2013.01); H01L 29/66712 (2013.01);
Abstract

A semiconductor device with super junction and process for the same is disclosed. The semiconductor device includes a silicon substrate and a first conductive type epitaxial layer thereon, a plurality of second conductive type conductive pillars formed below an upper face of the first conductive type epitaxial layer, where the second conductive type conductive pillars are implanted with neutral element having predetermined amount. When the semiconductor device operates in a predetermined temperature, the releasing amount of the neutral element can completely or partially compensate the releasing amount of carrier of opposite polarity from the epitaxial layer for the second conductive type conductive pillars due to the predetermined temperature, thus prevent the degrade of endurance ability for the surge voltage.


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