The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2019
Filed:
Jul. 03, 2015
Applicant:
Miraial Co., Ltd., Tokyo, JP;
Inventors:
Assignee:
MIRAIAL CO., LTD, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67383 (2013.01); H01L 21/67369 (2013.01); H01L 21/67373 (2013.01); H01L 21/67386 (2013.01); H01L 21/67376 (2013.01); H01L 21/67772 (2013.01);
Abstract
The plurality of protective grooveshas openingswider than thicknesses of the edge portions of the substrates W to allow the edge portions of the substrates W to be inserted. The edge portions of the substrates W are inserted into the protective groovesin a non-contact state in which a space is formed between the edge portions of the substrates W and a groove forming surfaceof the substrate edge portion protective portionon which the protective groovesare formed when the container main body opening portion is closed by the lid body and the edge portions of the substrates W are not in contact with the groove forming surface