The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 26, 2019

Filed:

Sep. 07, 2016
Applicant:

Mitchell B. Lerner, San Diego, CA (US);

Inventor:

Mitchell B. Lerner, San Diego, CA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01); H01L 21/02 (2006.01); C23C 16/04 (2006.01); C23C 16/26 (2006.01); C23C 16/56 (2006.01); H01L 21/04 (2006.01); H01L 29/16 (2006.01); H01L 29/06 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02645 (2013.01); C23C 16/04 (2013.01); C23C 16/26 (2013.01); C23C 16/56 (2013.01); H01L 21/02527 (2013.01); H01L 21/042 (2013.01); H01L 21/0425 (2013.01); H01L 21/44 (2013.01); H01L 29/0665 (2013.01); H01L 29/1606 (2013.01); H01L 29/78684 (2013.01); H01L 29/78696 (2013.01);
Abstract

Methods for fabricating a graphene nanoribbon array in accordance with several embodiments of the present invention can include the steps of depositing PMMA dots on a substrate in an m×n grid, to selectively seed graphene flakes on the substrate by controlling the growth of the graphene flakes on the substrate during the graphene deposition. The methods can further include the steps of masking the graphene flake edges with an insulator layer, at a very low deposition time or at a lower precursor concentration, to ensure there are not enough insulator molecules to form a complete layer over the flakes, but only enough insulator to form around the flakes edges. Once the graphene flake edges are masked, the bulk graphene can be etched, and the masking insulator can be removed to expose the resulting graphene nanoribbon.


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