The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2019
Filed:
Sep. 05, 2017
Applicant:
Toshiba Memory Corporation, Minato-ku, Tokyo, JP;
Inventor:
Nobuhiro Komine, Nagoya Aichi, JP;
Assignee:
TOSHIBA MEMORY CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); H01L 21/311 (2006.01); H01L 21/027 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); H01L 21/0271 (2013.01); H01L 21/31116 (2013.01); H01L 21/31144 (2013.01); H01L 21/76816 (2013.01);
Abstract
A plurality of light sources are provided and are able to be independently turned on and turned off. The light sources have directionality in directions of shot regions. The light sources, which are turned on so as to correspond to the shape of the shot region, are selected, thereby preventing an imprint material outside the shot region from being cured when an imprint pattern in the shot region is cured.