The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2019
Filed:
Oct. 19, 2015
Mti Gmbh, Villach, AT;
Markus Hacksteiner, Villach, AT;
MTI GmbH, Villach, AT;
Abstract
In order to test wafers, microchips and the like, electrical and/or electrochemical properties thereof are periodically measured using electrochemical processes and are stored. The test values are compared with each other in order to determine changes in the properties. The method is carried out using an apparatus designed as a measuring cell and including a test chamber which is located between an upper half-cell and a lower half-cell and through which electrolyte is conducted. The test chamber is closed by a cell cover which simultaneously presses a wafer against an O-seal in the direction of the upper half-cell. The opening forming the test chamber in the lower half-cell is closed by an O-seal, an anode disk and an anode cover.