The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2019
Filed:
May. 31, 2016
Applicant:
Ams Sensors Uk Limited, Cambridge, Cambridgeshire, GB;
Inventors:
Assignee:
AMS SENSORS UK LIMITED, Cambridge, Cambridgeshire, GB;
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/12 (2006.01); G01K 7/16 (2006.01); G01K 17/00 (2006.01); H01L 21/67 (2006.01); H05B 3/28 (2006.01); G01N 27/16 (2006.01);
U.S. Cl.
CPC ...
G01N 27/123 (2013.01); G01K 7/16 (2013.01); G01K 17/00 (2013.01); G01N 27/128 (2013.01); H01L 21/67109 (2013.01); H05B 3/283 (2013.01); G01N 27/16 (2013.01); H05B 2203/017 (2013.01);
Abstract
We disclose a micro-hotplate comprising a substrate comprising an etched portion and a substrate portion and a dielectric region over the substrate. The dielectric region comprises first and second portions. The first portion is adjacent to the etched portion of the substrate and the second portion is adjacent to the substrate portion of the substrate. The micro-hotplate further comprises a heater formed in the dielectric region, and a ring structure formed within and/or over the dielectric region such that the ring structure is coupled with the first and second portions of the dielectric region.