The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 26, 2019

Filed:

Mar. 15, 2016
Applicant:

Boe Technology Group Co., Ltd., Beijing, CN;

Inventors:

Dejiang Zhao, Beijing, CN;

Hao Wang, Beijing, CN;

Seiji Fujino, Beijing, CN;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/24 (2006.01); C23C 14/12 (2006.01);
U.S. Cl.
CPC ...
C23C 14/246 (2013.01); C23C 14/12 (2013.01); C23C 14/24 (2013.01); C23C 14/243 (2013.01);
Abstract

The present disclosure provides an evaporation device and an evaporation method using the evaporation device. The evaporation device includes a main chamber with an internal space and an evaporation mechanism under the main chamber. The evaporation mechanism includes at least two crucible accumulation chambers. The evaporation mechanism is configured to be operated in a first state where a first crucible accumulation chamber is at an evaporation position and in communication with the main chamber to form a vacuum space, and evaporation of a material in the crucible in the first crucible accumulation chamber is performed, and in a second state where, in a vacuum environment, the first crucible accumulation chamber is moved away from the evaporation position and a second crucible accumulation chamber is moved to the evaporation position and in communication with the main chamber.


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