The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2019
Filed:
Jun. 27, 2017
Applicant:
Globalfoundries Inc., Grand Cayman, KY;
Inventors:
Vincent J. McGahay, Poughkeepsie, NY (US);
Bhupesh Chandra, New York, NY (US);
Assignee:
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 9/56 (2006.01); H01L 41/18 (2006.01); H03H 3/08 (2006.01); H01L 41/257 (2013.01); H03H 3/02 (2006.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
H03H 9/56 (2013.01); H01L 41/18 (2013.01); H01L 41/257 (2013.01); H03H 3/02 (2013.01); H03H 3/08 (2013.01); H03H 9/02015 (2013.01); H03H 9/02543 (2013.01);
Abstract
The present disclosure relates to semiconductor structures and, more particularly, to artificially oriented piezoelectric films for integrated filters and methods of manufacture. The structure includes: a piezoelectric film with effective crystalline orientations of the polar axis rotated 90 degrees from a natural orientation for planar deposited films; and a conductor pattern formed on a surface of the piezoelectric film.