The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2019
Filed:
Dec. 03, 2018
Applicant:
Fujifilm Corporation, Tokyo, JP;
Inventors:
Naoki Murakami, Kanagawa, JP;
Daigo Sawaki, Kanagawa, JP;
Assignee:
FUJIFILM Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/18 (2006.01); H01L 41/187 (2006.01); C01G 25/00 (2006.01); C01G 33/00 (2006.01); C01F 17/00 (2006.01); C23C 14/08 (2006.01); H01L 41/09 (2006.01); H01L 41/316 (2013.01); C23C 16/40 (2006.01); H01L 41/047 (2006.01); H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1876 (2013.01); C01F 17/00 (2013.01); C01G 25/00 (2013.01); C01G 33/00 (2013.01); C01G 33/006 (2013.01); C23C 14/08 (2013.01); C23C 16/40 (2013.01); H01L 41/047 (2013.01); H01L 41/0805 (2013.01); H01L 41/09 (2013.01); H01L 41/187 (2013.01); H01L 41/316 (2013.01); C01P 2002/34 (2013.01); C01P 2002/54 (2013.01); C01P 2002/72 (2013.01); C01P 2006/40 (2013.01);
Abstract
In the piezoelectric film including a perovskite oxide which is represented by General Formula P, 0.1≤x≤0.3 and 0<y≤0.49x are satisfied, A[(Zr,Ti)NbSc]O. . . General Formula P, in General Formula P, A is an A-site element primarily containing Pb, δ=0 and z=3 are standard values, but δ and z may deviate from standard values in a range in which a perovskite structure is capable of being obtained.