The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 19, 2019

Filed:

Jun. 27, 2014
Applicant:

Kawasaki Jukogyo Kabushiki Kaisha, Kobe-shi, Hyogo, JP;

Inventors:

Yasuhiko Hashimoto, Kobe, JP;

Takayuki Fukushima, Takarazuka, JP;

Ryosuke Kanamaru, Kakogawa, JP;

Shinya Kinoshita, Akashi, JP;

Daiki Miyagawa, Akashi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67766 (2013.01); H01L 21/67207 (2013.01); H01L 21/67265 (2013.01); H01L 21/67781 (2013.01); H01L 21/68707 (2013.01);
Abstract

An end effector has a hand base portion at least a part of which advances below a lowermost substrate or above an uppermost substrate of a plurality of substrates stored in a substrate storing portion, a substrate holding unit provided to the hand base portion so as to hold the two or more substrates including the lowermost substrate or the uppermost substrate, and a protrusion amount change unit for changing a protrusion amount of the substrate holding unit from a reference surface including the surface of the hand base portion opposed to the lowermost substrate or the uppermost substrate. The protrusion amount change unit has a single drive source applying a drive force to the whole substrate holding unit.


Find Patent Forward Citations

Loading…