The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2019
Filed:
Jun. 07, 2016
J.e.t. Co., Ltd., Asakuchi-gun, JP;
Kazuo Sugihara, Asakuchi-gun, JP;
J.E.T. CO., LTD., Okayama, JP;
Abstract
A substrate treatment device includes: a substrate holding unit including a plate-shaped holding table that rotatably holds a substrate so that a surface of the substrate on which the fine patterns are formed faces downward, and a plurality of holding pins provided on the holding table to hold an outer periphery of the substrate at a plurality of points; a heater that heats the substrate; a cover that internally houses the substrate holding unit and the heater, and forms a treatment chamber; a pump that exhausts the treatment chamber to make a negative-pressure atmosphere; an inert gas supply port that faces an opposite side surface opposite to the surface with the fine patterns formed thereon, and supplies inert gas into the treatment chamber; and a nozzle to jet a cleaning solution toward the surface with the fine patterns formed thereon and a gas exhaust port to communicate with the pump.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile