The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 19, 2019

Filed:

Jul. 14, 2017
Applicant:

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventors:

Paul Gondcharton, Germigny L'exempt, FR;

Bruno Imbert, Grenoble, FR;

Hubert Moriceau, Saint-Egreve, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 20/00 (2006.01); H01L 21/18 (2006.01); B23K 20/24 (2006.01); B23K 31/02 (2006.01); H01L 23/00 (2006.01); H01L 33/00 (2010.01);
U.S. Cl.
CPC ...
H01L 21/187 (2013.01); B23K 20/002 (2013.01); B23K 20/24 (2013.01); B23K 31/02 (2013.01); H01L 21/185 (2013.01); H01L 24/05 (2013.01); H01L 33/0079 (2013.01); H01L 2224/056 (2013.01); H01L 2224/05647 (2013.01); H01L 2224/065 (2013.01); H01L 2224/80097 (2013.01); H01L 2224/80895 (2013.01);
Abstract

A method for assembling a first substrate and a second substrate by metal-metal direct bonding, includes providing a first layer of a metal at the surface of the first substrate and a second layer of the metal at the surface of the second substrate, the first and second metal layers having a tensile stress (σ) between 30% and 100% of the tensile yield strength (σ) of the metal; assembling the first and second substrates at a bonding interface by directly contacting the first and second tensile stressed metal layers; and subjecting the assembly of the first and second substrates to a stabilization annealing at a temperature lower than or equal to a temperature threshold beyond which the first and second tensile stressed metal layers are plastically compressively deformed.


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