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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10483097 B1

PDFFull Text
Date of Patent:
Nov. 19, 2019

Filed:

Sep. 06, 2017

Method for cleaning, passivation and functionalization of si—ge semiconductor surfaces

Applicant:

The Regents of the University of California, Oakland, CA (US);

Inventors:

Tobin Kaufman-Osborn, San Diego, CA (US);

Andrew C. Kummel, San Diego, CA (US);

Kiarash Kiantaj, La Jolla, CA (US);

Assignee:

The Regents of the University of California, Oakland, CA (US);

Attorneys:

Greer, Burns & Crain, Ltd.

Steven P. Fallon

Primary Examiner:

Michelle Mandala

Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/302 (2006.01); H01L 21/28 (2006.01); B08B 7/00 (2006.01); H01L 29/161 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0206 (2013.01); B08B 7/0035 (2013.01); H01L 21/0228 (2013.01); H01L 21/02046 (2013.01); H01L 21/02054 (2013.01); H01L 21/02301 (2013.01); H01L 21/02312 (2013.01); H01L 21/28255 (2013.01); H01L 21/302 (2013.01); H01L 29/161 (2013.01);
Abstract

A method for in-situ dry cleaning of a SiGe semiconductor surface, ex-situ degreases the Ge containing semiconductor surface and removes organic contaminants. The surface is then dosed with HF (aq) or NHF (g) generated via NH+NH or NFwith Hor HO to remove oxygen containing contaminants. In-situ dosing of the SiGe surface with atomic H removes carbon containing contaminants.

Find Patent Forward Citations

Kaufman-Osborn, Tobin. (2019). Method for cleaning, passivation and functionalization of si—ge semiconductor surfaces (U.S. Patent No. 10483097). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10483097

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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