The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2019
Filed:
Apr. 13, 2016
Lam Research Corporation, Fremont, CA (US);
Eric Russell Madsen, Aloha, OR (US);
Lance Dyrdahl, West Linn, OR (US);
LAM RESEARCH CORPORATION, Fremont, CA (US);
Abstract
A baffle plate assembly including a baffle plate, a ring and support members. The baffle plate has an outer diameter and configured to distribute gases through a showerhead of a showerhead assembly of a substrate processing system. The gases are received from a stem of the showerhead assembly. The ring has an inner diameter and configured to be disposed in a ring channel of the showerhead assembly. The inner diameter is greater than the outer diameter of the baffle plate. The support members extend from the baffle plate to the ring. The ring and the support members hold the baffle plate in a position between a top plate and a bottom plate of the showerhead.