The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2019
Filed:
Nov. 25, 2016
Applicant:
Hs Folis Oy, Espoo, FI;
Inventors:
Pekka Torma, Espoo, FI;
Heikki Johannes Sipila, Espoo, FI;
Assignee:
HS FOILS OY, Espoo, FI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 35/18 (2006.01); H01J 5/18 (2006.01); B23K 1/00 (2006.01); B23K 35/26 (2006.01); C23C 14/06 (2006.01); C23C 14/28 (2006.01); C23C 14/34 (2006.01); C23C 14/58 (2006.01); C23C 16/32 (2006.01); C23C 16/50 (2006.01); C23C 16/56 (2006.01); C23C 28/00 (2006.01); H01L 31/18 (2006.01); H01L 31/08 (2006.01);
U.S. Cl.
CPC ...
H01J 35/18 (2013.01); B23K 1/0008 (2013.01); B23K 35/26 (2013.01); C23C 14/0635 (2013.01); C23C 14/28 (2013.01); C23C 14/34 (2013.01); C23C 14/5873 (2013.01); C23C 16/32 (2013.01); C23C 16/50 (2013.01); C23C 16/56 (2013.01); C23C 28/32 (2013.01); H01J 5/18 (2013.01); H01L 31/1896 (2013.01); H01J 2235/183 (2013.01); H01L 31/085 (2013.01);
Abstract
For manufacturing a radiation window for an X-ray measurement apparatus, an etch stop layer is first produced on a polished surface of a carrier. A thin film deposition technique is used to produce a boron carbide layer on an opposite side of the etch stop layer than the carrier. The combined structure including the carrier, the etch stop layer, and the boron carbide layer is attached to a region around an opening in a support structure with the boron carbide layer facing the support structure. The middle area of carrier is etched away, leaving an additional support structure.