The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2019
Filed:
Jun. 13, 2014
Nikon Corporation, Tokyo, JP;
Tomoaki Yamada, Yokohama, JP;
Nikon Corporation, Tokyo, JP;
Abstract
An object is to measure the shape of an object to be measured under a more appropriate condition. A shape measuring device includes a projection unit configured to project a pattern onto a measurement target by light, an image capturing unit configured to capture a picture image of the measurement target onto which the pattern is projected by the projection unit, a movement unit capable of moving a projected position of the pattern on the measurement target by relatively moving the projection unit and the measurement target, and a region-of-interest setting unit configured to set a region of interest for acquiring information used to measure the measurement target to be in at least part of a region captured by the image capturing unit, so as to include an image of the pattern.