The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2019
Filed:
Jun. 09, 2017
Applicant:
Integrated Dynamics Engineering Gmbh, Raunheim, DE;
Inventors:
Arndt Evers, Oestrich-Winkel, DE;
Frank Hofmann, Rosbach, DE;
Han Hartgers, Mainz, DE;
Till Scharf, Heusenstamm, DE;
Assignee:
Integrated Dynamics Engineering GmbH, Raunheim, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16F 15/027 (2006.01); F16F 15/06 (2006.01); F16F 1/12 (2006.01); F16F 3/02 (2006.01); F16F 15/04 (2006.01);
U.S. Cl.
CPC ...
F16F 15/0275 (2013.01); F16F 1/122 (2013.01); F16F 15/063 (2013.01); F16F 1/128 (2013.01); F16F 3/02 (2013.01); F16F 15/046 (2013.01);
Abstract
A pneumatic actuator configured for a stationary vibration isolation system which serves to accommodate equipment for processing semiconductor devices. The pneumatic actuator comprises a working space with a piston which divides the working space into a first and a second pressure chamber, and the piston is spaced apart from an inner surface of the working space by a gap, and the piston is movable only in an axial direction.