The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2019
Filed:
Feb. 22, 2016
Samsung Display Co., Ltd., Yongin-si, Gyeonggi-do, KR;
Jai Hyuk Choi, Hwaseong-si, KR;
Won Woong Park, Seoul, KR;
Sung Hun Key, Seoul, KR;
Min Soo Kim, Asan-si, KR;
Byeong Chun Lee, Asan-si, KR;
Suk Won Jung, Seoul, KR;
Hyun Woo Joo, Yongin-si, KR;
Myung Soo Huh, Suwon-si, KR;
Samsung Display Co., Ltd., Yongin-si, KR;
Abstract
A plasma enhanced chemical vapor deposition (PECVD) apparatus including a chamber; an upper electrode in the chamber; a spray unit in the upper electrode to spray a gas introduced from outside the chamber toward a substrate inside the chamber; a susceptor on which the substrate is mountable; a plurality of mask supports in a mask frame at an edge of the susceptor, the mask supports being formed of a conductive material that provides elastic force by supporting a mask to maintain and control a level of the mask; and a power supply unit to supply power to the upper electrode.