The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 19, 2019

Filed:

Jun. 14, 2018
Applicant:

Hitachi Kokusai Electric Inc., Tokyo, JP;

Inventors:

Naoko Kitagawa, Toyama, JP;

Yuichi Wada, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/448 (2006.01); C23C 16/44 (2006.01); H01L 21/31 (2006.01); C23C 16/52 (2006.01); C23C 14/12 (2006.01); C23C 14/54 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/448 (2013.01); C23C 14/12 (2013.01); C23C 14/543 (2013.01); C23C 16/44 (2013.01); C23C 16/4412 (2013.01); C23C 16/45561 (2013.01); C23C 16/52 (2013.01); H01L 21/31 (2013.01);
Abstract

A storage device includes: a sidewall formed in a cylindrical shape; a cover wall disposed at an upper end of the sidewall; a bottom wall connected to a lower end of the sidewall and comprising a mounting surface mountable on a weight detector; a storage chamber surrounded by the sidewall, the cover wall, and the bottom wall; a recess communicating with the storage chamber and provided at the bottom wall; a communication pipe having one end connected to a bottom portion of the recess in a direction of gravity and the other end extending in a direction different from the direction of gravity in the bottom wall, the communication pipe having a diameter smaller than that of the recess; a gas flow path provided at a wall other than the bottom wall; and a liquid discharge path connected to a downstream side of the communication pipe.


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