The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2019
Filed:
Jul. 03, 2015
Applicant:
Pfeiffer Vacuum, Annecy, FR;
Inventors:
Julien Palisson, Sillingy, FR;
Catherine Le Guet, La Motte Servolex, FR;
Assignee:
PFEIFFER VACUUM, Annecy, FR;
Primary Examiner:
Int. Cl.
CPC ...
B60S 1/38 (2006.01); B08B 9/40 (2006.01); B08B 7/00 (2006.01); B08B 9/08 (2006.01); B08B 9/20 (2006.01);
U.S. Cl.
CPC ...
B08B 9/40 (2013.01); B08B 7/0035 (2013.01); B08B 9/0861 (2013.01); B08B 9/205 (2013.01);
Abstract
A method for treatment of a plastic transport box for conveyance and atmospheric storage of substrates including walls bounding a volume intended for storage of substrates, and a station for treatment of transport boxes for conveyance and atmospheric storage of substrates, the method including: at least one plasma treatment in which at least one interior wall of the transport box is subjected to a plasma of a treatment gas at a gas pressure lower than 10000 pascals.