The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2019
Filed:
Dec. 12, 2014
Qualcomm Incorporated, San Diego, CA (US);
Jon Bradley Lasiter, Stockton, CA (US);
Ravindra Vaman Shenoy, Dublin, CA (US);
Evgeni Petrovich Gousev, Saratoga, CA (US);
Hrishikesh Panchawagh, San Jose, CA (US);
David William Burns, San Jose, CA (US);
Nai-Kuei Kuo, San Jose, CA (US);
Jonathan Charles Griffiths, Fremont, CA (US);
Suryaprakash Ganti, Los Altos, CA (US);
QUALCOMM Incorporated, San Diego, CA (US);
Abstract
A piezoelectric micromechanical ultrasonic transducer (PMUT) includes a multilayer stack disposed on a substrate. The multilayer stack may include an anchor structure disposed over the substrate, a piezoelectric layer stack disposed over the anchor structure, and a mechanical layer disposed proximate to the piezoelectric layer stack. The piezoelectric layer stack may be disposed over a cavity. The mechanical layer may seal the cavity and, together with the piezoelectric layer stack, is supported by the anchor structure and forms a membrane over the cavity, the membrane being configured to undergo one or both of flexural motion and vibration when the PMUT receives or transmits ultrasonic signals.