The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 12, 2019

Filed:

Sep. 12, 2017
Applicant:

Samsung Display Co., Ltd., Yongin-si, Gyeonggi-do, KR;

Inventors:

Jongbum Kim, Yongin-si, KR;

Sangmin Yi, Yongin-si, KR;

Daewon Baek, Yongin-si, KR;

Minchul Song, Yongin-si, KR;

Sangshin Lee, Yongin-si, KR;

Seungjin Lee, Yongin-si, KR;

Jiyun Chun, Yongin-si, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05C 11/11 (2006.01); H01L 51/00 (2006.01); H01L 21/00 (2006.01); H01L 21/67 (2006.01); C23C 14/04 (2006.01); C23C 14/12 (2006.01); H01L 51/56 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0011 (2013.01); C23C 14/042 (2013.01); C23C 14/12 (2013.01); H01L 21/00 (2013.01); H01L 21/67 (2013.01); H01L 51/001 (2013.01); H01L 51/0002 (2013.01); H01L 51/0014 (2013.01); H01L 51/56 (2013.01);
Abstract

A method of manufacturing a division mask includes pulling opposite end portions of a mask member in a first direction to fasten the mask member to a fastening portion, forming a first pattern portion having a plurality of first openings on the fastened mask member, such that the first pattern portion has a longer length in the first direction toward a central portion of the first pattern portion, and cutting the opposite end portions of the mask member to detach the mask member from the fastening portion.


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