The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 12, 2019

Filed:

Oct. 12, 2018
Applicant:

Yunnan University, Kunming, Yunnan Province, CN;

Inventors:

Zhenghong Lu, Kunming, CN;

Tao Zhang, Kunming, CN;

Dengke Wang, Kunming, CN;

Assignee:

Yunnan University, Kunming, CN;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/786 (2006.01); H01L 29/10 (2006.01); H01L 51/52 (2006.01); H01L 51/05 (2006.01); H01L 27/32 (2006.01); H01L 51/10 (2006.01); H01L 51/56 (2006.01); H01L 51/50 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7869 (2013.01); H01L 27/3274 (2013.01); H01L 29/1033 (2013.01); H01L 29/78696 (2013.01); H01L 51/0529 (2013.01); H01L 51/52 (2013.01); H01L 51/0097 (2013.01); H01L 51/5012 (2013.01); H01L 51/5056 (2013.01);
Abstract

A method for preparing a layered metal oxide field effect material includes depositing a first metal oxide, a core-layer metal, and a second metal oxide sequentially on the substrate by vacuum vapor deposition, the first metal oxide and the core-layer metal undergoing a redox reaction to form a first surface layer and a core-layer precursor on the substrate, and the core-layer precursor and the second metal oxide undergoing a redox reaction to form a core layer and a second surface layer; and the band gap of the metal oxide in the core layer is ≥3 eV, the band gaps of the metal oxide in the first surface layer and the second surface layer are independently ≤3 eV, and the difference between the band gap of the metal oxide in the core layer and the band gap of the metal oxide in the first surface layer is ≥1 eV. The present preparation method has advantages of simple operation, a low production cost, a good film forming property, and the high carrier mobility of the product.


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