The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2019
Filed:
Dec. 10, 2017
Applicant:
Renesas Electronics Corporation, Koutou-ku, Tokyo, JP;
Inventors:
Masaru Kadoshima, Tokyo, JP;
Masahiko Fujisawa, Tokyo, JP;
Assignee:
Renesas Electronics Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/12 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 29/08 (2006.01); H01L 23/522 (2006.01); H01L 21/762 (2006.01); H01L 21/768 (2006.01); H01L 21/02 (2006.01); H01L 21/84 (2006.01); H01L 29/786 (2006.01); H01L 29/417 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0847 (2013.01); H01L 21/0265 (2013.01); H01L 21/76283 (2013.01); H01L 21/76802 (2013.01); H01L 21/76897 (2013.01); H01L 21/84 (2013.01); H01L 23/5226 (2013.01); H01L 27/1203 (2013.01); H01L 29/41733 (2013.01); H01L 29/66772 (2013.01); H01L 29/78618 (2013.01); H01L 29/78624 (2013.01); H01L 29/78654 (2013.01); H01L 21/0262 (2013.01); H01L 21/02532 (2013.01); H01L 21/02647 (2013.01);
Abstract
In a semiconductor device, a width of a second epitaxial layer is greater than a width of a first epitaxial layer, and a thickness of an end portion of the second epitaxial layer, which is in contact with an element isolation portion, is smaller than a thickness of an end portion of the first epitaxial layer, which is in contact with the element isolation portion, and a second shortest distance between the element isolation portion and a second plug is greater than a first shortest distance between the element isolation portion and a first plug.