The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 12, 2019

Filed:

Aug. 31, 2018
Applicant:

Toshiba Memory Corporation, Tokyo, JP;

Inventors:

Yuichi Ito, Yokkaichi Mie, JP;

Kouji Matsuo, Ama Aichi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/22 (2006.01); H01L 45/00 (2006.01); H01L 43/02 (2006.01); H01L 43/12 (2006.01);
U.S. Cl.
CPC ...
H01L 27/224 (2013.01); H01L 43/02 (2013.01); H01L 43/12 (2013.01); H01L 45/065 (2013.01); H01L 45/1233 (2013.01); H01L 45/1253 (2013.01); H01L 45/141 (2013.01); H01L 45/1608 (2013.01);
Abstract

According to one embodiment, a method of manufacturing a storage device comprises forming a state change layer on a substrate. The state change layer has first and second resistance states. The state change layer is switchable from one to the other of the first and second resistance states according to a magnitude of a voltage applied thereto. A conductor is formed on an upper surface of the state change layer. The conductor comprises carbon. An upper surface of the conductor is processed to reduce the roughness thereof. A first ferromagnetic material is then formed on the upper surface of the conductor. A nonmagnetic material is formed on an upper surface of the first ferromagnetic material. A second ferromagnetic material is formed on an upper surface of the nonmagnetic material.


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