The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 12, 2019

Filed:

Sep. 26, 2017
Applicant:

Stmicroelectronics S.r.l., Agrate Brianza, IT;

Inventors:

Ruggero Anzalone, Viagrande, IT;

Nicolo Frazzetto, San Giovanni la Punta, IT;

Aldo Raciti, Misterbianco, IT;

Marco Antonio Salanitri, Catania, IT;

Giuseppe Abbondanza, San Giovanni la Punta, IT;

Giuseppe D'Arrigo, San Giovannia la Punta, IT;

Assignee:

STMICROELECTRONICS S.R.L., Agrate Brianza, IT;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/02 (2006.01); H01L 21/687 (2006.01); C23C 16/32 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67109 (2013.01); H01L 21/02381 (2013.01); H01L 21/02529 (2013.01); H01L 21/02609 (2013.01); H01L 21/02614 (2013.01);
Abstract

Various embodiments provide a reaction chamber including a support, a receptacle, and a sponge. The support includes a plurality of bars that are spaced from each other by a plurality of openings. Each of the bars has side surfaces that are slanted or tilted downward such that melted material may readily flow through the openings. The support is covered with a coating of silicon carbide to prevent materials from adhering to the support. The receptacle underlies the support and is configured to collect any melted material that is drained through the openings of the support. The sponge is positioned in the receptacle and under the support. The sponge is configured to absorb any melted material that is collected by the receptacle.


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