The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 12, 2019

Filed:

May. 04, 2015
Applicant:

Jyväskylän Yliopisto, Jyväskylä, FI;

Inventors:

Mika Pettersson, Jyväskylä, FI;

Andreas Johansson, Jyväskylä, FI;

Jukka Aumanen, Jyväskylä, FI;

Pasi Myllyperkiö, Jyväskylä, FI;

Juha Koivistoinen, Jyväskylä, FI;

Assignee:

Jyv¿skyl¿nYliopisto, Jyv¿skyl¿, FI;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/268 (2006.01); H01L 51/00 (2006.01); H01L 21/04 (2006.01); H01L 29/16 (2006.01); C01B 32/168 (2017.01); C01B 32/194 (2017.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
H01L 21/268 (2013.01); C01B 32/168 (2017.08); C01B 32/194 (2017.08); H01L 21/042 (2013.01); H01L 29/1606 (2013.01); H01L 51/0017 (2013.01); H01L 51/0027 (2013.01); H01L 51/0048 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C01B 2202/02 (2013.01); C01B 2202/06 (2013.01); C01B 2204/02 (2013.01); C01B 2204/04 (2013.01); Y10S 977/734 (2013.01); Y10S 977/745 (2013.01); Y10S 977/75 (2013.01); Y10S 977/752 (2013.01); Y10S 977/847 (2013.01); Y10S 977/932 (2013.01);
Abstract

A method for patterning a piece of carbon nanomaterial. The method comprises generating a first light pulse sequence with first light pulse sequence property values, the first light pulse sequence comprising at least one light pulse and exposing a first area of the piece of carbon nanomaterial to said first light pulse sequence in a first process environment having a first oxygen content, without exposing at least part of the piece of carbon nanomaterial to said first light pulse sequence. In this way, the method comprises oxidizing locally, in the first area, at least some carbon atoms of the piece of carbon nanomaterial in such a way that at most 10% of the carbon atoms of the first area are removed from the first area; thereby patterning the first area of the piece of carbon nanomaterial. In addition a processed piece of carbon nanomaterial.


Find Patent Forward Citations

Loading…