The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 12, 2019

Filed:

Mar. 22, 2017
Applicant:

Samsung Display Co., Ltd., Yongin-si, Gyeonggi-Do, KR;

Inventors:

Hong Ro Lee, Seongnam-si, KR;

Rae Chul Park, Asan-si, KR;

Chung Hwan Lee, Seoul, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Yongin-si, Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); B23K 26/064 (2014.01); B23K 26/70 (2014.01); H01L 27/12 (2006.01); B23K 26/00 (2014.01); B23K 26/06 (2014.01); B23K 26/08 (2014.01); B23K 26/352 (2014.01); G02B 5/00 (2006.01); B23K 101/40 (2006.01); B23K 103/16 (2006.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02675 (2013.01); B23K 26/0006 (2013.01); B23K 26/0608 (2013.01); B23K 26/0643 (2013.01); B23K 26/083 (2013.01); B23K 26/352 (2015.10); B23K 26/704 (2015.10); H01L 27/1274 (2013.01); B23K 2101/40 (2018.08); B23K 2103/172 (2018.08); B23K 2103/56 (2018.08); G02B 5/003 (2013.01); H01L 21/02532 (2013.01); H01L 21/02691 (2013.01);
Abstract

A laser crystallization device includes a laser oscillator, a stage, and a reflection unit. The stage is configured to support a substrate with a target film disposed on the substrate. The laser oscillator is configured to irradiate an incident laser beam on the target film. The stage is configured to move the substrate such that the incident laser beam scans the target film. The incident laser beam is reflected from the target film to generate a reflected laser beam. The reflection unit includes at least two reflection mirrors positioned at a path of the reflected laser beam. The reflection unit is configured to re-irradiate the reflected laser beam on the target film two or more times through a plurality of paths that are different from a path of the incident laser beam.


Find Patent Forward Citations

Loading…