The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2019
Filed:
Apr. 22, 2016
Applicants:
Yukihiro Yoshida, Tokyo, JP;
Koji Takenaka, Tokyo, JP;
Hisanori Aga, Tokyo, JP;
Inventors:
Assignee:
MITSUMI ELECTRIC CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 26/12 (2006.01); G02B 26/10 (2006.01);
U.S. Cl.
CPC ...
G02B 26/129 (2013.01); G02B 26/0858 (2013.01); G02B 26/101 (2013.01);
Abstract
An optical scanning device that scans incident light by causing a mirror to oscillate is provided. The optical scanning device includes a displacement sensor for detecting a swing angle of the mirror and a temperature sensor used for temperature compensation of the displacement sensor. The displacement sensor is a piezoelectric sensor that has a structure in which a lower electrode, a piezoelectric film, and an upper electrode are layered in this order. The temperature sensor is a resistance type temperature measuring body that has a same layer structure as the lower electrode.