The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2019
Filed:
Aug. 24, 2016
Applicant:
Stmicroelectronics S.r.l., Agrate Brianza, IT;
Inventors:
Giorgio Allegato, Monza, IT;
Sonia Costantini, Missaglia Lecco, IT;
Federico Vercesi, Milan, IT;
Roberto Carminati, Piancogno, IT;
Assignee:
STMicroelectronics S.r.l., Agrate Brianza, IT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/10 (2006.01); B81C 1/00 (2006.01); G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
G02B 26/105 (2013.01); B81C 1/00317 (2013.01); G02B 26/0833 (2013.01); B81B 2201/042 (2013.01); B81C 2203/0109 (2013.01); B81C 2203/019 (2013.01);
Abstract
Disclosed herein is a micro-electro mechanical (MEMS) device including a substrate, and a MEMS mirror stack on the substrate. A first bonding layer seals against ingress of environmental contaminants and mechanically anchors the MEMS mirror stack to the substrate. A cap layer is formed on the MEMS mirror stack. A second boding layer seals against ingress of environmental contaminants and mechanically anchors the cap layer to the MEMS mirror stack.