The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2019
Filed:
May. 12, 2017
National Technology & Engineering Solutions of Sandia, Llc, Albuquerque, NM (US);
Paul J. Resnick, Albuquerque, NM (US);
Brian D. Homeijer, Albuquerque, NM (US);
Thomas A. Friedmann, Albuquerque, NM (US);
Michael Wiwi, Albuquerque, NM (US);
National Technology & Engineering Solutions of Sandia, LLC, Albuquerque, NM (US);
Abstract
A microelectromechanical systems (MEMS) accelerometer that has high sensitivity to motion along the z axis is discussed. The device includes two symmetrical sets of bilateral, diametrically opposed high aspect ratio flexures that tether a movable proof mass to the frame of the device. The flexures are designed in such a way as to restrict movement of the proof mass along the x and y axes but readily allow motion along the z axis. More specifically, when the device experiences an acceleration along the x or y axes, the proof mass is restricted from moving because some of the bilateral, diametrically opposed flexures are in compression and others are in tension.