The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 12, 2019

Filed:

Nov. 06, 2015
Applicant:

Tdk Corporation, Tokyo, JP;

Inventors:

Masahiro Oishi, Tokyo, JP;

Atsuo Matsutani, Tokyo, JP;

Ryu Ohta, Tokyo, JP;

Assignee:

TDK CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/18 (2006.01); C01G 33/00 (2006.01); H01L 41/08 (2006.01); H01L 41/113 (2006.01); H01L 41/187 (2006.01); H01L 41/09 (2006.01); B41J 2/14 (2006.01); G01N 21/65 (2006.01); H01L 41/316 (2013.01);
U.S. Cl.
CPC ...
C01G 33/006 (2013.01); B41J 2/14233 (2013.01); H01L 41/0805 (2013.01); H01L 41/0973 (2013.01); H01L 41/1132 (2013.01); H01L 41/1873 (2013.01); B41J 2202/03 (2013.01); C01P 2002/34 (2013.01); C01P 2002/82 (2013.01); C01P 2006/40 (2013.01); G01N 21/65 (2013.01); H01L 41/316 (2013.01);
Abstract

A piezoelectric layer made of potassium sodium niobate which is a perovskite type compound represented by the formula ABO, wherein, in the Raman spectroscopy measurement of the piezoelectric layer which is performed while the piezoelectric layer is rotated in the in-plane direction, the measured intensity of the lattice vibration region of the perovskite type compound in the Raman spectrum obtained in polarized Raman spectroscopy measurement (yx) has a periodicity of approximately 90°, wherein, the polarized Raman spectroscopy measurement (yx) is performed while the piezoelectric layer is rotated in the in-plane direction and Raman scattering light is polarized in a direction perpendicular to that of the incident light.


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