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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10471479 B1

PDFFull Text
Date of Patent:
Nov. 12, 2019

Filed:

Nov. 07, 2013

Treatment device and exhaust switching device therefor, and exhaust switching unit and switching valve box

Applicants:

Screen Holdings Co., Ltd., Kyoto, JP;

Kitz Sct Corporation, Tokyo, JP;

Inventors:

Toshihito Morioka, Kyoto, JP;

Hideaki Higuchi, Gunma, JP;

Toshiaki Iwabuchi, Gunma, JP;

Tsutomu Kojima, Gunma, JP;

Assignees:

SCREEN HOLDINGS CO., LTD., Kyoto, JP;

KITZ SCT CORPORATION, Tokyo, JP;

Attorney:

Wenderoth, Lind & Ponack, L.L.P.

Primary Examiner:

Joseph L Perrin

Assistant Examiner:

Irina Graf

Int. Cl.
CPC ...
H01L 21/67 (2006.01); B08B 15/00 (2006.01); B08B 3/04 (2006.01); G03F 7/30 (2006.01);
U.S. Cl.
CPC ...
B08B 3/04 (2013.01); G03F 7/30 (2013.01); H01L 21/67017 (2013.01); H01L 21/6719 (2013.01); H01L 21/67023 (2013.01); H01L 21/67028 (2013.01); H01L 21/67155 (2013.01); Y10T 137/877 (2015.04);
Abstract

A treatment device treats a treatment subject inside a treatment chamber with treatment fluids of a plurality of types. An exhaust switching unit is provided to an exhaust pipe connected to the inside of the treatment chamber, and the exhaust switching unit is formed of a distribution box, switching valve boxes, and an exhaust tube. Additionally, the switching valve boxes, which correspond in number to the treatment fluids, are connected to the distribution box in a parallel state.

Find Patent Forward Citations

Morioka, Toshihito. (2019). Treatment device and exhaust switching device therefor, and exhaust switching unit and switching valve box (U.S. Patent No. 10471479). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10471479

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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