The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2019
Filed:
Mar. 15, 2018
Applicant:
Nissin Ion Equipment Co., Ltd., Kyoto-shi, Kyoto, JP;
Inventors:
Suguru Itoi, Kyoto, JP;
Hideki Fujita, Kyoto, JP;
Assignee:
Nissin Ion Equipment Co., Ltd., Kyoto-shi, Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H 1/11 (2006.01); H05H 1/46 (2006.01); H05H 1/14 (2006.01); G21B 1/05 (2006.01);
U.S. Cl.
CPC ...
H05H 1/11 (2013.01); H05H 1/14 (2013.01); H05H 1/46 (2013.01); H05H 2001/4622 (2013.01);
Abstract
A plasma source is provided. The plasma source includes a chamber body inside which plasma is generated, a first mirror magnet, a second mirror magnet, and a cusp magnet provided around the chamber body and spaced apart in a axial direction thereof, each comprising permanent magnets radially spaced apart from each other to form spaces between adjacent permanent magnets thereof; and a cooling medium flow passage provided in the spaces that passes a cooling medium for cooling the chamber body.