The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 05, 2019

Filed:

Apr. 07, 2011
Applicants:

Shinya Morita, Kobe, JP;

Toshihiro Kugimiya, Kobe, JP;

Takeaki Maeda, Kobe, JP;

Satoshi Yasuno, Kobe, JP;

Yasuaki Terao, Kobe, JP;

Aya Miki, Kobe, JP;

Inventors:

Shinya Morita, Kobe, JP;

Toshihiro Kugimiya, Kobe, JP;

Takeaki Maeda, Kobe, JP;

Satoshi Yasuno, Kobe, JP;

Yasuaki Terao, Kobe, JP;

Aya Miki, Kobe, JP;

Assignee:

Kobe Steel, Ltd., Kobe-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); H01L 29/786 (2006.01); H01L 21/02 (2006.01); C23C 14/08 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7869 (2013.01); C23C 14/08 (2013.01); C23C 14/3414 (2013.01); H01L 21/02554 (2013.01); H01L 21/02565 (2013.01); H01L 21/02631 (2013.01);
Abstract

Disclosed is an oxide for a semiconductor layer of a thin film transistor, which, when used in a thin film transistor that includes an oxide semiconductor in the semiconductor layer, imparts good switching characteristics and stress resistance to the transistor. Specifically disclosed is an oxide for a semiconductor layer of a thin film transistor, which is used for a semiconductor layer of a thin film transistor and contains at least one element selected from the group consisting of In, Ga and Zn and at least one element selected from the group X consisting of Al, Si, Ni, Ge, Sn, Hf, Ta and W.


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