The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 05, 2019

Filed:

Mar. 26, 2018
Applicant:

Sensors Unlimited, Inc., Princeton, NJ (US);

Inventors:

Wei Huang, Plainsborough, NJ (US);

Wei Zhang, West Windsor, NJ (US);

Joshua Lund, Dallas, TX (US);

Namwoong Paik, Lawrenceville, NJ (US);

Assignee:

Sensors Unlimited, Inc., Princeton, NJ (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 27/144 (2006.01); H01L 31/109 (2006.01); H01L 31/0352 (2006.01); H01L 31/0304 (2006.01); H01L 31/0216 (2014.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1446 (2013.01); H01L 27/1443 (2013.01); H01L 31/02161 (2013.01); H01L 31/03042 (2013.01); H01L 31/03046 (2013.01); H01L 31/035281 (2013.01); H01L 31/109 (2013.01); H01L 31/1844 (2013.01);
Abstract

A photodiode includes an absorption layer. A cap layer is disposed on a surface of the absorption layer. A pixel diffusion area within the cap layer extends beyond the surface of the absorption layer and into the absorption layer to receive a charge generated from photons therefrom. A mesa trench is defined through the cap layer surrounding the pixel diffusion area, wherein the mesa trench defines a floor at the surface of the absorption layer and opposed sidewalls extending away from the surface of the absorption layer. An implant is aligned with the mesa trench and extends from the floor of the mesa trench through the absorption layer surrounding a portion of the absorption layer proximate the pixel diffusion area.


Find Patent Forward Citations

Loading…