The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2019
Filed:
Aug. 23, 2016
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Karl M. Brown, Santa Clara, CA (US);
Jason Schaller, Austin, TX (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); H01L 21/687 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); C23C 14/50 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68785 (2013.01); C23C 14/50 (2013.01); H01J 37/32477 (2013.01); H01L 21/6719 (2013.01); H01L 21/67069 (2013.01); H01L 21/68707 (2013.01);
Abstract
A shutter disk suitable for shield a substrate support in a physical vapor deposition chamber is provided. In one embodiment, the shutter disk includes a disk-shaped body having an outer diameter disposed between a top surface and a bottom surface. The disk-shape body includes a double step connecting the bottom surface to the outer diameter.