The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2019
Filed:
Sep. 05, 2018
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Gaku Furuta, Sunnyvale, CA (US);
Soo Young Choi, Fremont, CA (US);
Yi Cui, San Jose, CA (US);
Robin L. Tiner, Santa Cruz, CA (US);
Jinhyun Cho, Santa Clara, CA (US);
Jiarui Wang, San Jose, CA (US);
Suhail Anwar, Saratoga, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); H01J 29/07 (2006.01); C23C 16/458 (2006.01); C23C 16/04 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 29/073 (2013.01); C23C 16/042 (2013.01); C23C 16/4585 (2013.01); H01J 37/32477 (2013.01); H01J 37/32715 (2013.01); H01J 2229/0716 (2013.01); H01J 2229/0722 (2013.01);
Abstract
Embodiments of the present disclosure generally relates a shadow frame including two opposing major side frame members adjacent to two opposing minor side frame members coupled together with a corner bracket, wherein the corner bracket includes a corner inlay having legs that extend in directions generally orthogonal to each other.