The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2019
Filed:
Feb. 09, 2018
Applicant:
Daicel Corporation, Osaka-shi, Osaka, JP;
Inventor:
Yuichi Sakanishi, Tokyo, JP;
Assignee:
DAICEL CORPORATION, Osaka-Shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/16 (2006.01); H01L 21/308 (2006.01); H01L 21/304 (2006.01); G03F 7/32 (2006.01); G03F 7/40 (2006.01); G03F 7/039 (2006.01); H01L 21/027 (2006.01); G03F 7/38 (2006.01);
U.S. Cl.
CPC ...
G03F 7/168 (2013.01); G03F 7/039 (2013.01); G03F 7/0392 (2013.01); G03F 7/162 (2013.01); G03F 7/32 (2013.01); G03F 7/322 (2013.01); G03F 7/38 (2013.01); G03F 7/40 (2013.01); H01L 21/0273 (2013.01); H01L 21/304 (2013.01); H01L 21/3081 (2013.01); H01L 21/3086 (2013.01);
Abstract
Problem to be Solved Provided is an agent for resist hydrophilization treatment that can hydrophilize a surface of a resist coating rapidly and stably while inhibiting deterioration of the resist coating. Solution An agent for resist hydrophilization treatment of the present invention comprises at least following components (A) and (B):