The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 05, 2019

Filed:

Aug. 17, 2017
Applicants:

Boe Technology Group Co., Ltd., Beijing, CN;

Beijing Boe Display Technology Co., Ltd., Beijing, CN;

Inventors:

Shichao Ma, Beijing, CN;

Pengfei Wang, Beijing, CN;

Chongxi Wei, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02F 1/1339 (2006.01); G03F 7/09 (2006.01); G03F 7/039 (2006.01); H01L 21/16 (2006.01);
U.S. Cl.
CPC ...
G02F 1/1339 (2013.01); G02F 1/13394 (2013.01); G03F 7/039 (2013.01); G03F 7/091 (2013.01); G03F 7/7075 (2013.01); G03F 7/70875 (2013.01); H01L 21/164 (2013.01); G02F 2001/13398 (2013.01);
Abstract

The present disclosure provides a method for processing a photoresist component, including steps of: placing a photoresist component to be processed on a heating device comprising a plurality of heating components; and controlling, based on a heating parameter, each of the plurality of heating components associated with the heating parameter to heat the photoresist component to be processed. The heating parameter is determined based on a photoresist component parameter of the photoresist component to be processed and a process parameter of forming the photoresist component. The present disclosure further provides a device for processing a photoresist component.


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