The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 05, 2019

Filed:

Dec. 29, 2015
Applicants:

Tsinghua University, Beijing, CN;

Nuctech Company Limited, Beijing, CN;

Inventors:

Kejun Kang, Beijing, CN;

Shuwei Li, Beijing, CN;

Qingjun Zhang, Beijing, CN;

Yuanjing Li, Beijing, CN;

Yulan Li, Beijing, CN;

Ziran Zhao, Beijing, CN;

Yinong Liu, Beijing, CN;

Yaohong Liu, Beijing, CN;

Weibin Zhu, Beijing, CN;

Xiaolin Zhao, Beijing, CN;

Huishao He, Beijing, CN;

Assignees:

TSINGHUA UNIVERSITY, Beijing, CN;

NUCTECH COMPANY LIMITED, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01T 7/00 (2006.01); G01T 1/20 (2006.01); H04N 5/57 (2006.01); G01T 1/16 (2006.01); H01L 27/30 (2006.01); H05G 1/36 (2006.01); G21K 1/02 (2006.01); G01T 1/17 (2006.01); G01V 5/00 (2006.01); H04N 5/369 (2011.01); G06T 1/00 (2006.01);
U.S. Cl.
CPC ...
G01T 7/00 (2013.01); G01T 1/1603 (2013.01); G01T 1/2006 (2013.01); H01L 27/30 (2013.01); H04N 5/57 (2013.01); H05G 1/36 (2013.01); G01T 1/17 (2013.01); G01V 5/0016 (2013.01); G06T 1/0014 (2013.01); G09G 2320/0626 (2013.01); G09G 2320/0646 (2013.01); G21K 1/02 (2013.01); H04N 5/3698 (2013.01);
Abstract

The present invention discloses an X-ray beam intensity monitoring device and an X-ray inspection system. The X-ray beam intensity monitoring device comprises an intensity detecting module and a data processing module, wherein the intensity detecting module is adopted to be irradiated by the X-ray beam and send a detecting signal, the data processing module is coupled with the intensity detecting module to receive the detecting signal and output an X-ray beam intensity monitoring signal, wherein the X-ray beam intensity monitoring signal includes a dose monitoring signal for the X-ray beam and a brightness correction signal for correcting signal values of the X-ray beam. The X-ray beam intensity monitoring device can simultaneously perform dose monitoring and brightness monitoring, thereby improving the service efficiency of the X-ray beam intensity monitoring device. Moreover, the monitoring result of the X-ray beam intensity can be more accurate and reliable.


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